Tracemap12

Tracemap12

Looking for an alternative to measure your semiconductor wafer MicrOptik offers Tracemap12 that is an automated accessory that can measure in diffuse reflectance and transmission mode also can be used  for analysis of oxygen, epitaxial growth, borophosphosilicate glass, and carbon in wafer sizes from 50 to 300 mm.
 
The tracemap12 is a larger version of this original design and it is capable of handling 12-inch (300 mm) wafer formats. The Tracemap12 mount fit in the sample compartment of the FTIR spectrometer. Semiconductor wafers are held in place by retaining clips and are never in contact with the aluminum stage of the accessory. 
 
The optical design of the tracemap12 offers the best collection of light possible due to his spherical mirror that let gather more light in the specular reflectance mode. All the wafer can be measure using MicrOptik technology that rotate and translate the sample using stepper motors and programmed in a sequence that you want.
 
This accessory also include a purge tubes to eliminate the atmospheric interference in the spectrum, also can be purge with air or nitrogen. If you want a highly purge as well a wafer purge enclosure is offered.
The accessory is controlled by MicrOptik’s software which provides a simple user interface for multiple point wafer mapping. Tracemap12 is USB controlled. 
Features:
  • 12-inches (300 mm) semiconductor wafer control.
  • Designed to handle multiple position measurement and trace all the semiconductor wafer, Everything is automated.
  • Several wafer can be handle in this instrument for wafer sizes from 2 to 12 inches.
  • Measurement in Specular reflectance and transmission just moving the control knob.